Microstructure of silicon-incorporated carbon films with various silicon concentration deposited by hybrid magnetron sputtering/chemical vapor deposition

Type
article
Resource
Chien-Hsun Chen, Pei-Hui Chen, Duen-Jeng Wang, Shih-Fu Ou, Ya-Ju Hsu, Keng-Liang Ou(2012).Microstructure of silicon-incorporated carbon films with various silicon concentration deposited by hybrid magnetron sputtering/chemical vapor deposition. Ceramic International.():-.
Date Issued
2012
Author(s)
Chen, Chien-Hsun;Chen, Pei-Hui;Wang, Duen-Jeng;Ou, Shih-Fu;Hsu, Ya-Ju;Ou, Keng-Liang
Subjects
生醫材料暨組織工程研究所
期刊論文
URI

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