Analysis of Replication and Surface Roughness of Micro-feature of Silicon Mild Insert by UV-LIGA Method

Type
article
Resource
Advanced Materials Research:443-446.
Date Issued
2008
Author(s)
Huang CF; Lee JL; Shen YK; Wu CW; Hsu SC; Wu MW
Subjects
牙體技術學系
期刊論文
URI

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