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Interfacial reactions and electrical properties of hafnium-based thin films in Cu/barrier/n+- junction diodes
Type
article
Resource
Microelec Eng.(77):184-192.
Date Issued
2005
Author(s)
李勝揚;林哲堂
Ou K-L; Tsai M-H; Huang H-M; Chiou S-Y; Lin C-T; Lee S-Y
Subjects
牙醫學系
期刊論文
File(s)
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Name
attachment.pdf
Size
65.57 KB
Format
Adobe PDF
Checksum
(MD5):e148133943c786642332adb197b1925d