The effect of deposition parameters and post treatment on the electrical properties of Mo thin films

Type
article
Resource
Su CY, Liao KH, Pan CT, Peng PW(2012).The effect of deposition parameters and post treatment on the electrical properties of Mo thin films. Thin Solid Films.(520):5936-5939.
Date Issued
2012
Author(s)
CY, Su;KH, Liao;CT, Pan;PW, Peng
Subjects
牙體技術學系
期刊論文
URI

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