Microstructure of silicon-incorporated carbon films with various silicon concentration deposited by hybrid magnetron sputtering/chemical vapor deposition

Chen, Chien-Hsun;Chen, Pei-Hui;Wang, Duen-Jeng;Ou, Shih-Fu;Hsu, Ya-Ju;Ou, Keng-LiangChien-Hsun;Chen, Pei-Hui;Wang, Duen-Jeng;Ou, Shih-Fu;Hsu, Ya-Ju;Ou, Keng-LiangChen2026-05-222026-05-222012https://203.71.86.71/handle/123456789/28015生醫材料暨組織工程研究所期刊論文Microstructure of silicon-incorporated carbon films with various silicon concentration deposited by hybrid magnetron sputtering/chemical vapor depositionarticle