歐耿良Ou KL; Chiou SY; Lin MH;2026-05-222026-05-222004https://203.71.86.71/handle/123456789/27777en-US生醫材料暨組織工程研究所期刊論文High Cu Diffusion Resistance in Ultrathin Multi-quasi-amorphous CVD-Ti/TiNx Filmsarticle