Fabrication of High-Frequency Tantalum Nitride Thin Film Resistors by Two-Step Plasma Ion Etching

Ou, Keng-Liang;Yu, Yvonne;Wu, Chi-ChangKeng-Liang;Yu, Yvonne;Wu, Chi-ChangOu2026-05-222026-05-222012https://203.71.86.71/handle/123456789/28329生醫材料暨組織工程研究所會議論文Fabrication of High-Frequency Tantalum Nitride Thin Film Resistors by Two-Step Plasma Ion Etchingconference